Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468925 | Plasma enhanced chemical vapor deposition process | Philip Campbell, Sujit Sharan, Allen Mardian | 2002-10-22 |
| 6439967 | Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies | — | 2002-08-27 |
| 6412437 | Plasma enhanced chemical vapor deposition reactor and plasma enhanced chemical vapor deposition process | Philip Campbell, Sujit Sharan, Allen Mardian | 2002-07-02 |
| 6407499 | Method of removing surface protrusions from thin films | James J. Alwan | 2002-06-18 |