Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461436 | Apparatus and process of improving atomic layer deposition chamber performance | Philip Campbell | 2002-10-08 |
| 6458714 | Method of selective oxidation in semiconductor manufacture | Don Powell, Ron Weimer, Lyle Breiner, Howard Rhodes, Jeff McKee | 2002-10-01 |