Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489242 | Process for planarization of integrated circuit structure which inhibits cracking of low dielectric constant dielectric material adjacent underlying raised structures | Jayanthi Pallinti, Dawn M. Lee | 2002-12-03 |
| 6417093 | Process for planarization of metal-filled trenches of integrated circuit structures by forming a layer of planarizable material over the metal layer prior to planarizing | James J. Xie, Jayanthi Pallinti, Akihisa Ueno | 2002-07-09 |
| 6372524 | Method for CMP endpoint detection | James J. Xie, Jayanthi Pallinti | 2002-04-16 |