Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6417093 | Process for planarization of metal-filled trenches of integrated circuit structures by forming a layer of planarizable material over the metal layer prior to planarizing | James J. Xie, Ronald J. Nagahara, Jayanthi Pallinti | 2002-07-09 |
| 6340434 | Method and apparatus for chemical-mechanical polishing | Hiroshi Mizuno, Osamu Kinoshita, Tetsuaki Murohashi, Yoshifumi Sakuma, Kostas Amberiadis | 2002-01-22 |