Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6417093 | Process for planarization of metal-filled trenches of integrated circuit structures by forming a layer of planarizable material over the metal layer prior to planarizing | Ronald J. Nagahara, Jayanthi Pallinti, Akihisa Ueno | 2002-07-09 |
| 6372524 | Method for CMP endpoint detection | Jayanthi Pallinti, Ronald J. Nagahara | 2002-04-16 |