Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483690 | Ceramic electrostatic chuck assembly and method of making | Shu Nakajima | 2002-11-19 |
| 6344105 | Techniques for improving etch rate uniformity | John Daugherty, Jeff A. Bogart, Vahid Vahedi, David Cooperberg, Alan J. Miller +1 more | 2002-02-05 |