Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6344105 | Techniques for improving etch rate uniformity | John Daugherty, Neil Benjamin, Vahid Vahedi, David Cooperberg, Alan J. Miller +1 more | 2002-02-05 |
JB
Jeff A. Bogart
Overall (2002): #194,887 of 266,432Top 75%
1
Patents 2002