Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489245 | Methods for reducing mask erosion during plasma etching | Jaroslaw W. Winniczek | 2002-12-03 |
| 6344105 | Techniques for improving etch rate uniformity | John Daugherty, Neil Benjamin, Jeff A. Bogart, David Cooperberg, Alan J. Miller +1 more | 2002-02-05 |