Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432832 | Method of improving the profile angle between narrow and wide features | Yosias Melaku | 2002-08-13 |
| 6344105 | Techniques for improving etch rate uniformity | John Daugherty, Neil Benjamin, Jeff A. Bogart, Vahid Vahedi, David Cooperberg +1 more | 2002-02-05 |