Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483690 | Ceramic electrostatic chuck assembly and method of making | Neil Benjamin | 2002-11-19 |
| 6452775 | Electrostatic chuck and method for manufacturing the same | — | 2002-09-17 |
| 6422173 | Apparatus and methods for actively controlling RF peak-to-peak voltage in an inductively coupled plasma etching system | — | 2002-07-23 |
| 6368452 | Plasma treatment apparatus and method of semiconductor processing | — | 2002-04-09 |