Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447217 | Substrate transfer device and operating method thereof | Masaki Kusuhara, Masaru Umeda, Michio Yagai | 2002-09-10 |
| 6398464 | Air stream transfer apparatus | Michio Yagai, Masaru Umeda | 2002-06-04 |
| 6394733 | Substrate body transfer apparatus | Masaki Kusuhara, Masaru Umeda, Michio Yagai | 2002-05-28 |
| 6343239 | Transportation method for substrate wafers and transportation apparatus | Tadahiro Ohmi, Yoshio Ishihara | 2002-01-29 |