Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447217 | Substrate transfer device and operating method thereof | Masayuki Toda, Masaru Umeda, Michio Yagai | 2002-09-10 |
| 6394733 | Substrate body transfer apparatus | Masayuki Toda, Masaru Umeda, Michio Yagai | 2002-05-28 |