Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447217 | Substrate transfer device and operating method thereof | Masayuki Toda, Masaki Kusuhara, Masaru Umeda | 2002-09-10 |
| 6398464 | Air stream transfer apparatus | Masayuki Toda, Masaru Umeda | 2002-06-04 |
| 6394733 | Substrate body transfer apparatus | Masayuki Toda, Masaki Kusuhara, Masaru Umeda | 2002-05-28 |