Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6375911 | Method and device for treating exhaust gas | Tadahiro Ohmi, Koh Matsumoto, Tetsuya Kimijima | 2002-04-23 |
| 6343239 | Transportation method for substrate wafers and transportation apparatus | Masayuki Toda, Tadahiro Ohmi | 2002-01-29 |