Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491518 | Apparatus for high-temperature and high-pressure treatment | Takahiko Ishii, Yutaka Narukawa, Makoto Kadoguchi | 2002-12-10 |
| 6451682 | Method of forming interconnect film | Makoto Kadoguchi, Kohei Suzuki, Yasushi Mizusawa, Tomoyasu Kondou, Yoji Taguchi | 2002-09-17 |
| 6447600 | Method of removing defects of single crystal material and single crystal material from which defects are removed by the method | Jun Furukawa, Mitsuru Sudou, Tetsuya Nakai, Takuya Masui | 2002-09-10 |