Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491518 | Apparatus for high-temperature and high-pressure treatment | Takao Fujikawa, Takahiko Ishii, Makoto Kadoguchi | 2002-12-10 |
| 6455446 | High-temperature high-pressure processing method for semiconductor wafers, and an anti-oxidizing body used for the method | Makoto Kadoguchi | 2002-09-24 |
| 6390811 | High-temperature and high-pressure treatment device | Tsuneharu Masuda, Takahiko Ishii | 2002-05-21 |