Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491518 | Apparatus for high-temperature and high-pressure treatment | Takao Fujikawa, Takahiko Ishii, Yutaka Narukawa | 2002-12-10 |
| 6455446 | High-temperature high-pressure processing method for semiconductor wafers, and an anti-oxidizing body used for the method | Yutaka Narukawa | 2002-09-24 |
| 6451682 | Method of forming interconnect film | Takao Fujikawa, Kohei Suzuki, Yasushi Mizusawa, Tomoyasu Kondou, Yoji Taguchi | 2002-09-17 |