Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6451682 | Method of forming interconnect film | Takao Fujikawa, Makoto Kadoguchi, Yasushi Mizusawa, Tomoyasu Kondou, Yoji Taguchi | 2002-09-17 |
| 6364953 | Method and apparatus for making aerogel film | Nobuyuki Kawakami, Yoshito Fukumoto, Kenichi Inoue, Takashi Kinoshita, Katsuhiro Uehara | 2002-04-02 |