Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474987 | Wafer holder | Katsuo Arai, Makoto Shinohara, Fumitomo Kawahara, Makoto Saito, Yasuhiko Kawamura | 2002-11-05 |
| 6447600 | Method of removing defects of single crystal material and single crystal material from which defects are removed by the method | Jun Furukawa, Mitsuru Sudou, Takao Fujikawa, Takuya Masui | 2002-09-10 |
| 6393189 | Optical beam diameter reducer | Yoshinori Mimura, Yukio Noda, Toshio Tani | 2002-05-21 |