Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474987 | Wafer holder | Tetsuya Nakai, Katsuo Arai, Fumitomo Kawahara, Makoto Saito, Yasuhiko Kawamura | 2002-11-05 |
| 6414277 | Ultra-high-temperature heat treatment apparatus | Toshio Nanbu | 2002-07-02 |