Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474987 | Wafer holder | Tetsuya Nakai, Katsuo Arai, Makoto Shinohara, Fumitomo Kawahara, Makoto Saito | 2002-11-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6474987 | Wafer holder | Tetsuya Nakai, Katsuo Arai, Makoto Shinohara, Fumitomo Kawahara, Makoto Saito | 2002-11-05 |