Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406995 | Pattern-sensitive deposition for damascene processing | Makarem A. Hussein, Alan M. Myers, Charles Recchia, Angelo Kandas | 2002-06-18 |
| 6384481 | Single step electroplating process for interconnect via fill and metal line patterning | Makarem A. Hussein, Kevin J. Lee | 2002-05-07 |
| 6365529 | Method for patterning dual damascene interconnects using a sacrificial light absorbing material | Makarem A. Hussein | 2002-04-02 |
| 6350670 | Method for making a semiconductor device having a carbon doped oxide insulating layer | Ebrahim Andideh, Larry Wong | 2002-02-26 |