Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6406995 | Pattern-sensitive deposition for damascene processing | Alan M. Myers, Charles Recchia, Sam Sivakumar, Angelo Kandas | 2002-06-18 |
| 6384481 | Single step electroplating process for interconnect via fill and metal line patterning | Kevin J. Lee, Sam Sivakumar | 2002-05-07 |
| 6365529 | Method for patterning dual damascene interconnects using a sacrificial light absorbing material | Sam Sivakumar | 2002-04-02 |