Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482754 | Method of forming a carbon doped oxide layer on a substrate | Kevin Peterson | 2002-11-19 |
| 6448185 | Method for making a semiconductor device that has a dual damascene interconnect | Alan M. Myers | 2002-09-10 |
| 6437444 | Interlayer dielectric with a composite dielectric stack | — | 2002-08-20 |
| 6417098 | Enhanced surface modification of low K carbon-doped oxide | Lawrence Wong, Donald Danielson, Sarah Bowen | 2002-07-09 |
| 6392271 | Structure and process flow for fabrication of dual gate floating body integrated MOS transistors | Mohsen Alavi, Scott Thompson, Mark Bohr | 2002-05-21 |
| 6380010 | Shielded channel transistor structure with embedded source/drain junctions | Lawrence N. Brigham, Richard Green | 2002-04-30 |
| 6362091 | Method for making a semiconductor device having a low-k dielectric layer | Qing Ma, Quan Tran, Steve Towle | 2002-03-26 |
| 6350670 | Method for making a semiconductor device having a carbon doped oxide insulating layer | Sam Sivakumar, Larry Wong | 2002-02-26 |