Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472315 | Method of via patterning utilizing hard mask and stripping patterning material at low temperature | Phi L. Nguyen | 2002-10-29 |
| 6432811 | Method of forming structural reinforcement of highly porous low k dielectric films by Cu diffusion barrier structures | — | 2002-08-13 |
| 6417098 | Enhanced surface modification of low K carbon-doped oxide | Donald Danielson, Sarah Bowen, Ebrahim Andideh | 2002-07-09 |