Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6419170 | Adjustable nozzle assembly for semiconductor wafer backside rinsing | — | 2002-07-16 |
| 6406273 | Pressure fluctuation dampening system | — | 2002-06-18 |
| 6368416 | Method for validating pre-process adjustments to a wafer cleaning system | — | 2002-04-09 |
| 6350670 | Method for making a semiconductor device having a carbon doped oxide insulating layer | Ebrahim Andideh, Sam Sivakumar | 2002-02-26 |