Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479921 | Micro-electromechanical structure resonator, method of making, and method of using | Peng Cheng | 2002-11-12 |
| 6445106 | Micro-electromechanical structure resonator, method of making, and method of using | Peng Cheng | 2002-09-03 |
| 6423570 | Method to protect an encapsulated die package during back grinding with a solder metallization layer and devices formed thereby | Xiao-Chun Mu, Quat Vu | 2002-07-23 |
| 6362091 | Method for making a semiconductor device having a low-k dielectric layer | Ebrahim Andideh, Quan Tran, Steve Towle | 2002-03-26 |
| 6355534 | Variable tunable range MEMS capacitor | Peng Cheng | 2002-03-12 |