Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6479921 | Micro-electromechanical structure resonator, method of making, and method of using | Qing Ma | 2002-11-12 |
| 6445106 | Micro-electromechanical structure resonator, method of making, and method of using | Qing Ma | 2002-09-03 |
| 6355534 | Variable tunable range MEMS capacitor | Qing Ma | 2002-03-12 |