Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6448173 | Aluminum-based metallization exhibiting reduced electromigration and method therefor | Lawrence A. Clevenger, Ronald G. Filippi, Kenneth P. Rodbell, Roy Iggulden, Chao-Kun Hu +3 more | 2002-09-10 |
| 6361880 | CVD/PVD/CVD/PVD fill process | Larry Clevenger, Roy Iggulden, Stefan Weber | 2002-03-26 |
| 6344409 | Dummy patterns for aluminum chemical polishing (CMP) | Mark A. Jaso | 2002-02-05 |