Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6465282 | Method of forming a self-aligned antifuse link | Dirk Tobben, Axel Brintzinger | 2002-10-15 |
| 6448173 | Aluminum-based metallization exhibiting reduced electromigration and method therefor | Lawrence A. Clevenger, Ronald G. Filippi, Kenneth P. Rodbell, Roy Iggulden, Chao-Kun Hu +3 more | 2002-09-10 |
| 6413866 | Method of forming a solute-enriched layer in a substrate surface and article formed thereby | Horatio S. Wildman, Lawrence A. Clevenger, Chenting Lin, Kenneth P. Rodbell, Roy Iggulden +2 more | 2002-07-02 |
| 6373135 | Semiconductor structure and method of fabrication | — | 2002-04-16 |
| 6361880 | CVD/PVD/CVD/PVD fill process | Larry Clevenger, Roy Iggulden, Rainer Florian Schnabel | 2002-03-26 |