Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387782 | Process of forming an ultra-shallow junction dopant layer having a peak concentration within a dielectric layer | Hiroyuki Akatsu, Omer H. Dokumaci, Yujun Li, Rajesh Rengarajan, Paul A. Ronsheim | 2002-05-14 |
| 6348388 | Process for fabricating a uniform gate oxide of a vertical transistor | Johnathan E. Faltermeier, Ulrike Gruening, Rajarao Jammy, Brian Lee, Helmut Tews | 2002-02-19 |