Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485894 | Method to self-align a lithographic pattern to a workpiece | Franz Zach | 2002-11-26 |
| 6449202 | DRAM direct sensing scheme | Louis L. Hsu, Jeremy K. Stephens, Daniel W. Storaska | 2002-09-10 |
| 6387782 | Process of forming an ultra-shallow junction dopant layer having a peak concentration within a dielectric layer | Omer H. Dokumaci, Suryanarayan G. Hegde, Yujun Li, Rajesh Rengarajan, Paul A. Ronsheim | 2002-05-14 |
| 6379577 | Hydrogen peroxide and acid etchant for a wet etch process | David E. Kotecki, Jingyu Lian, Hua Shen | 2002-04-30 |