Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6440808 | Damascene-gate process for the fabrication of MOSFET devices with minimum poly-gate depletion, silicided source and drain junctions, and low sheet resistance gate-poly | Diane C. Boyd, Stephen Bruce Brodsky, Hussein I. Hanafi | 2002-08-27 |
| 6440851 | Method and structure for controlling the interface roughness of cobalt disilicide | Paul D. Agnello, Cyril Cabral, Jr., Roy A. Carruthers, James M. E. Harper, Christian Lavoie +4 more | 2002-08-27 |
| 6413859 | Method and structure for retarding high temperature agglomeration of silicides using alloys | Cyril Cabral, Jr., Roy A. Carruthers, James M. E. Harper, Paul Kozlowski, Christian Lavoie +1 more | 2002-07-02 |
| 6410430 | Enhanced ultra-shallow junctions in CMOS using high temperature silicide process | Kam-Leung Lee | 2002-06-25 |