Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483117 | Symmetric blanking for high stability in electron beam exposure systems | Clay S. Clement, Michael S. Gordon, Werner Stickel | 2002-11-19 |
| 6437347 | Target locking system for electron beam lithography | John G. Hartley | 2002-08-20 |
| 6414313 | Multiple numerical aperture electron beam projection lithography system | Michael S. Gordon, David J. Pinckney | 2002-07-02 |
| 6369396 | Calibration target for electron beams | John G. Hartley, Timothy R. Groves, Maris A. Sturans | 2002-04-09 |
| 6353231 | Pinhole detector for electron intensity distribution | Steven D. Golladay, Michael S. Gordon, Carl E. Bohnenkamp | 2002-03-05 |