Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461680 | Simplified fabrication method of toroidal charged particle deflector vanes | — | 2002-10-08 |
| 6414313 | Multiple numerical aperture electron beam projection lithography system | Michael S. Gordon, Rodney A. Kendall | 2002-07-02 |