Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486953 | Accurate real-time landing angle and telecentricity measurement in lithographic systems | Michael S. Gordon, James D. Rockrohr, Maris A. Sturans | 2002-11-26 |
| 6437347 | Target locking system for electron beam lithography | Rodney A. Kendall | 2002-08-20 |
| 6369396 | Calibration target for electron beams | Timothy R. Groves, Rodney A. Kendall, Maris A. Sturans | 2002-04-09 |