Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483117 | Symmetric blanking for high stability in electron beam exposure systems | Clay S. Clement, Michael S. Gordon, Rodney A. Kendall | 2002-11-19 |
| 6420713 | Image position and lens field control in electron beam systems | Steven D. Golladay | 2002-07-16 |