Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6387596 | Method of forming resist images by periodic pattern removal | Daniel C. Cole, Edward W. Conrad, Randy W. Mann, Paul W. Pastel, Jed H. Rankin +1 more | 2002-05-14 |
| 6342323 | Alignment methodology for lithography | William H. Ma, Toshiharu Furukawa, Steven J. Holmes, Mark C. Hakey | 2002-01-29 |
| 6338921 | Mask with linewidth compensation and method of making same | James A. Bruce, Randy W. Mann, Jed H. Rankin, Andrew J. Watts | 2002-01-15 |