Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6395438 | Method of etch bias proximity correction | Orest Bula, Edward W. Conrad, William C. Leipold | 2002-05-28 |
| 6395624 | Method for forming implants in semiconductor fabrication | Randy W. Mann | 2002-05-28 |
| 6369397 | SPM base focal plane positioning | Brent A. Anderson, Steven J. Holmes, Peter H. Mitchell, Robert A. Myers | 2002-04-09 |
| 6338921 | Mask with linewidth compensation and method of making same | David V. Horak, Randy W. Mann, Jed H. Rankin, Andrew J. Watts | 2002-01-15 |