Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6411362 | Rotational mask scanning exposure method and apparatus | Michael K. Coffey | 2002-06-25 |
| 6369397 | SPM base focal plane positioning | James A. Bruce, Steven J. Holmes, Peter H. Mitchell, Robert A. Myers | 2002-04-09 |