Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6420274 | Method for conditioning process chambers | John Baker, Marc W. Cantell, Alejandro G. Schrott, Ying Zhang | 2002-07-16 |
| 6403393 | Device having integrated optical and copper conductors and method of fabricating same | James W. Adkisson, Anthony K. Stamper | 2002-06-11 |
| 6387596 | Method of forming resist images by periodic pattern removal | Daniel C. Cole, Edward W. Conrad, David V. Horak, Randy W. Mann, Jed H. Rankin +1 more | 2002-05-14 |