Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429091 | Patterned buried insulator | Bomy Chen, Alexander Hirsch, Sundar Iyer, Nivo Rovedo, Hsing-Jen Wann | 2002-08-06 |
| 6420274 | Method for conditioning process chambers | John Baker, Marc W. Cantell, Paul W. Pastel, Alejandro G. Schrott | 2002-07-16 |