Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482566 | Hydroxycarborane photoresists and process for using same in bilayer thin film imaging lithography | Donald C. Hofer, Scott A. MacDonald, Robert D. Miller, Josef Michl, Gregory Michael Wallraff | 2002-11-19 |
| 6420084 | Mask-making using resist having SIO bond-containing polymer | Marie Angelopoulos, Ari Aviram, C. Richard Guarnieri, Wu-Song Huang, Ranee W. Kwong +3 more | 2002-07-16 |