Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482566 | Hydroxycarborane photoresists and process for using same in bilayer thin film imaging lithography | Donald C. Hofer, Arpan Mahorowala, Robert D. Miller, Josef Michl, Gregory Michael Wallraff | 2002-11-19 |