Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462888 | Diffuser master | Gajendra D. Savant, Andrew Kostrzewski | 2002-10-08 |
| 6383938 | Method of anisotropic etching of substrates | Tamarak Pandhumsoporn, Michael Feldbaum, Michel Puech | 2002-05-07 |
| 6341995 | Chemical mechanical polishing apparatus | Chien-Hsin Lai, Juen-Kuen Lin, Jung-Nan Tseng, Huang-Yi Lin | 2002-01-29 |