Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416615 | Device for detecting abnormality in chemical-mechanical polishing operation | Chien-Hsin Lai, Hui-Shen Shih, Jung-Nan Tseng | 2002-07-09 |
| 6341995 | Chemical mechanical polishing apparatus | Chien-Hsin Lai, Juen-Kuen Lin, Jung-Nan Tseng, Kevin Yu | 2002-01-29 |