Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6352244 | Auxiliary gasline-heating unit in chemical vapor deposition | Chien-Hsin Lai, Peng-Yih Peng, Fu-Yang Yu | 2002-03-05 |
| 6341995 | Chemical mechanical polishing apparatus | Chien-Hsin Lai, Jung-Nan Tseng, Huang-Yi Lin, Kevin Yu | 2002-01-29 |