Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6416615 | Device for detecting abnormality in chemical-mechanical polishing operation | Hui-Shen Shih, Jung-Nan Tseng, Huang-Yi Lin | 2002-07-09 |
| 6352244 | Auxiliary gasline-heating unit in chemical vapor deposition | Juen-Kuen Lin, Peng-Yih Peng, Fu-Yang Yu | 2002-03-05 |
| 6341995 | Chemical mechanical polishing apparatus | Juen-Kuen Lin, Jung-Nan Tseng, Huang-Yi Lin, Kevin Yu | 2002-01-29 |