Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6431113 | Plasma vacuum substrate treatment process and system | — | 2002-08-13 |
| 6383938 | Method of anisotropic etching of substrates | Tamarak Pandhumsoporn, Kevin Yu, Michael Feldbaum | 2002-05-07 |