Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6438438 | Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices | Yuji Takagi, Makoto Ono | 2002-08-20 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Asahiro Kuni +8 more | 2002-04-23 |